000 00343nam a2200133Ia 4500
008 160316s2013 xxu||||| |||| 00| 0 eng d
020 _a
100 _aRichard Vicary
245 _aThe Thames And Hudson Manual Of Advanced Lithography
250 _a1st
260 _aLONDON & NEW YORK
_bTHAMES AND HUDSON
_c2013
300 _a189
700 _a
_a
999 _c30939
_d30939